Patent Assignment Details
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| Reel/Frame: | 011726/0745 | |
| Pages: | 2 |
| | Recorded: | 04/19/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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09769490
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Filing Dt:
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01/26/2001
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Publication #:
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Pub Dt:
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09/13/2001
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Title:
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X-RAY EXPOSURE APPARATUS, X-RAY EXPOSURE METHOD, X-RAY MASK, X-RAY MIRROR, SYNCHROTRON RADIATION APPARATUS, SYNCHROTRON RADIATION METHOD AND SEMICONDUCTOR DEVICE
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Assignees
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100-8310, JAPAN |
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO 146-8501, JAPAN |
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Correspondence name and address
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MCDERMOTT, WILL & EMERY
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STEPHEN A. BECKER
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005
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