Patent Assignment Details
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Reel/Frame: | 011752/0532 | |
| Pages: | 7 |
| | Recorded: | 04/23/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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09763138
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Filing Dt:
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04/20/2001
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Title:
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DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USING A PLASMA ETCHING INSTALLATION AND DEVICE AND METHOD FOR IGNITING A PLASMA AND FOR PULSING THE PLASMA OUT PUT OR ADJUSTING THE SAME UPWARDS
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Assignee
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POSTFACH 30 02 20 |
70442 STUTTGART FEDERAL REPUBLIC OF, GERMANY |
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Correspondence name and address
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KENYON & KENYON
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RICHARD L. MAYER
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ONE BROADWAY
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NEW YORK, NEW YORK 10004
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