Patent Assignment Details
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| Reel/Frame: | 011793/0085 | |
| Pages: | 3 |
| | Recorded: | 05/10/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09676871
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Filing Dt:
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09/29/2000
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Title:
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AN IN-SITU METHOD FOR MEASURING THE ENDPOINT OF A RESIST RECESS ETCH PROCESS
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Assignee
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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Correspondence name and address
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SIEMENS CORPORATION
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ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NEW JERSEY 08830
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