Patent Assignment Details
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| Reel/Frame: | 011797/0838 | |
| Pages: | 10 |
| | Recorded: | 05/14/2001 | | |
| Conveyance: | SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09641461
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Filing Dt:
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08/18/2000
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Title:
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Method and apparatus for thermal processing of semiconductor substrates
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Assignee
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| 2010 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95131 |
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Correspondence name and address
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GREENE RADOVSKY, ET AL.
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RUSSELL D. POLLOCK, ESQ.
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FOUR EMBARCADERO CENTER, SUITE 4000
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SAN FRANCISCO, CA 94111
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