Patent Assignment Details
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| Reel/Frame: | 011824/0922 | |
| Pages: | 4 |
| | Recorded: | 05/18/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09748735
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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IN-PROCESS WAFER CHARGE MONITOR AND CONTROL SYSTEM FOR ION IMPLANTER
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Assignee
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| ATTN: JOHN A. KASTELIC |
| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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EATON CORPORATION
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ATTN: JOHN A. KASTELIC
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EATON CENTER
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1111 SUPERIOR AVENUE
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CLEVELAND, OHIO 44114-2584
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