Patent Assignment Details
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Reel/Frame: | 011834/0342 | |
| Pages: | 3 |
| | Recorded: | 05/29/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09865734
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Filing Dt:
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05/29/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus
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Assignee
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2-3, MARUNOUCHI 3-CHOME |
TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW ET AL
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MR. ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, DC 20005-3315
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