Patent Assignment Details
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| Reel/Frame: | 011876/0130 | |
| Pages: | 3 |
| | Recorded: | 06/01/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09873157
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Filing Dt:
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06/01/2001
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Publication #:
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Pub Dt:
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12/05/2002
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Title:
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METHOD FOR MEASURING WIDTH OF BOTTOM UNDER CUT DURING ETCHING PROCESS
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 16, CREATION ROAD 1 |
| HSINCHU, TAIWAN |
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Correspondence name and address
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JASON Z. LIN
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19597 VIA MONTE DRIVE
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SARATOGA, CA 95070
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