Patent Assignment Details
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| Reel/Frame: | 011940/0657 | |
| Pages: | 3 |
| | Recorded: | 06/29/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09806516
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Filing Dt:
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04/16/2001
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Title:
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SHAPE MEASURING METHOD AND SHAPE MEASURING DEVICE, POSITION CONTROL METHOD, STAGE DEVICE, EXPOSURE APPARATUS AND METHOD FOR PRODUCING EXPOSURE APPARATUS, AND DEVICE AND METHOD FOR MANUFACTURING DEVICE
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
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SURINDER SACHAR
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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