Patent Assignment Details
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| Reel/Frame: | 011943/0730 | |
| Pages: | 2 |
| | Recorded: | 06/26/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09892927
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Filing Dt:
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06/26/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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APPARATUS AND METHOD FOR MEASURING PATTERN ALIGNMENT ERROR
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Assignee
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| 16-3, HIGASHI 3-CHOME, SHIBUYA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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MORRISON & FOERSTER LLP
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DAVID L. FEHRMAN
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555 WEST FIFTH STREET
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SUITE 3500
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LOS ANGELES, CALIFORNIA 90013-1024
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