Patent Assignment Details
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| Reel/Frame: | 011973/0449 | |
| Pages: | 3 |
| | Recorded: | 07/02/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09898194
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Filing Dt:
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07/02/2001
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Title:
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PROCESS FOR REMOVAL OF PHOTORESIST MASK USED FOR MAKING VIAS IN LOW K CARBON-DOPED SILICON OXIDE DIELECTRIC MATERIAL, AND FOR REMOVAL OF ETCH RESIDUES FROM FORMATION OF VIAS AND REMOVAL OF PHOTORESIST MASK
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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SANDEEP JAGGI, CHIEF IP COUNSEL
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INTELLECTUAL PROPERTY LAW DEPARTMENT
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M/S D-106, 1551 MCCARTHY BOULEVARD
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MILPITAS, CA 95035
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