Patent Assignment Details
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Reel/Frame: | 012020/0335 | |
| Pages: | 3 |
| | Recorded: | 07/24/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09911654
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Filing Dt:
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07/24/2001
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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RF BIAS CONTROL IN PLASMA DEPOSITION AND ETCH SYSTEMS WITH MULTIPLE RF POWER SOURCES
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Assignee
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3-6 AKASAKA 5-CHOME |
TBS BROADCAST CENTER |
MINATO-KU, TOKYO 107, JAPAN |
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Correspondence name and address
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WOOD, HERRON & EVANS, LLP
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C. RICHARD EBY, ESQ.
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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