Total properties:
14
|
|
Patent #:
|
|
Issue Dt:
|
03/07/1989
|
Application #:
|
06838319
|
Filing Dt:
|
03/10/1986
|
Title:
|
METHOD AND APPARATUS FOR DETECTING DEFECT INFORMATION IN A HOLOGRAPHIC IMAGE PATTERN
|
|
|
Patent #:
|
|
Issue Dt:
|
12/22/1987
|
Application #:
|
06895310
|
Filing Dt:
|
08/11/1986
|
Title:
|
ARRANGEMENT FOR DETECTING SECONDARY AND/OR BACKSCATTER ELECTRONS IN AN ELECTRON BEAM APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/1989
|
Application #:
|
07130028
|
Filing Dt:
|
12/08/1987
|
Title:
|
DETECTOR OBJECTIVE FOR PARTICLE BEAM APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/1990
|
Application #:
|
07150245
|
Filing Dt:
|
01/29/1988
|
Title:
|
DETECTOR OBJECTIVE FOR SCANNING MICROSCOPES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/1990
|
Application #:
|
07312619
|
Filing Dt:
|
02/17/1989
|
Title:
|
SYSTEM FOR MEASURING A TOPOGRAPHICAL FEATURE ON A SPECIMEN
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/1990
|
Application #:
|
07416996
|
Filing Dt:
|
10/02/1989
|
Title:
|
METHOD FOR EXAMINING A SPECIMEN IN A PARTICLE BEAM INSTRUMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
06/04/1991
|
Application #:
|
07463543
|
Filing Dt:
|
01/11/1990
|
Title:
|
MULTIPOLE ELEMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
12/15/1992
|
Application #:
|
07608208
|
Filing Dt:
|
11/02/1990
|
Title:
|
SPATIAL FILTER FOR OPTICALLY BASED DEFECT INSPECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/09/1992
|
Application #:
|
07613208
|
Filing Dt:
|
11/14/1990
|
Title:
|
INSPECTION SYSTEM FOR ARRAY OF MICROCIRCUIT DIES HAVING REDUNDANT CIRCUIT PATTERNS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/1992
|
Application #:
|
07691238
|
Filing Dt:
|
04/25/1991
|
Title:
|
PARTICLE BEAM APPARATUS HAVING AN IMMERSION LENS ARRANGED IN AN INTERMEDIATE IMAGE OF THE BEAM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/1994
|
Application #:
|
07974267
|
Filing Dt:
|
11/10/1992
|
Title:
|
DEVICE FOR CORPUSCULAR-OPTICAL EXAMINATION AND/OR PROCESSING OF MATERIAL SAMPLES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/1995
|
Application #:
|
08130281
|
Filing Dt:
|
09/30/1993
|
Title:
|
INSPECTION SYSTEM WITH IN-LENS, OFF-AXIS ILLUMINATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/1998
|
Application #:
|
08865380
|
Filing Dt:
|
05/29/1997
|
Title:
|
A METHOD OF HIGH SPEED, HIGH DETECTION SENSITIVITY INSPECTION OF REPETITIVE AND RANDOM SPECIMENT PATTERNS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/1999
|
Application #:
|
08984558
|
Filing Dt:
|
12/03/1997
|
Title:
|
OPTICAL INSPECTION METHOD AND APPARATUS
|
|