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Patent Assignment Details
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Reel/Frame:012046/0138   Pages: 3
Recorded: 07/24/2001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/01/2003
Application #:
09912579
Filing Dt:
07/24/2001
Publication #:
Pub Dt:
01/30/2003
Title:
Plasma etching process for metals and metal oxides, including metals and metal oxides inert to oxidation
Assignors
1
Exec Dt:
07/24/2001
2
Exec Dt:
07/24/2001
Assignee
1
3050 BOWERS AVE.
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL, LEGAL AFFAIRS DEPARTMENT
M/S 2061, P.O. BOX 450
SANTA CLARA, CA 95052

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