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Reel/Frame:012122/0461   Pages: 3
Recorded: 08/22/2001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/18/2004
Application #:
09935090
Filing Dt:
08/22/2001
Publication #:
Pub Dt:
03/14/2002
Title:
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR MANUFACTURING APPARATUS
Assignors
1
Exec Dt:
08/10/2001
2
Exec Dt:
08/10/2001
3
Exec Dt:
08/10/2001
4
Exec Dt:
08/10/2001
Assignee
1
NAKAHARA-KU, KAWASAKI
1-1, KAMIKODANAKA 4-CHOME
KANAGAWA 211-8588, JAPAN
Correspondence name and address
GREER, BURNS & CRAIN, LTD.
PATRICK G. BURNS
300 SOUTH WACKER DRIVE
25TH FLOOR
CHICAGO, IL 60606

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