Patent Assignment Details
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| Reel/Frame: | 012161/0941 | |
| Pages: | 2 |
| | Recorded: | 09/04/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09946395
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Filing Dt:
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09/04/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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Electron beam exposure apparatus, device for shaping a beam of charged particles and method for manufacturing the device
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Assignee
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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Correspondence name and address
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MORRISON & FOERSTER, LLP
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DAVID L. FEHRMAN
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555 WEST FIFTH STREET
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SUITE 3500
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LOS ANGELES, CA 90013-1024
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