Patent Assignment Details
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| Reel/Frame: | 012183/0305 | |
| Pages: | 3 |
| | Recorded: | 09/21/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09906712
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Filing Dt:
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07/18/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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SINGLE-SUBSTRATE-HEAT-PROCESSING APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS
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Assignee
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER ET AL
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JOSEPH A. SCAFETTA, JR.
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1755 JEFFERSON DAVIS HIGHWAY
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ATTORNEYS AT LAW, FOURTH FLOOR
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ARLINGTON, VIRGINIA 22202
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