Patent Assignment Details
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Reel/Frame: | 012236/0576 | |
| Pages: | 3 |
| | Recorded: | 10/09/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09841044
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Filing Dt:
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04/25/2001
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Publication #:
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Pub Dt:
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04/11/2002
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Title:
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Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing method
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Assignee
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2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO 100-8331, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND ET AL
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JOSEPH A. SCAFETTA, JR.
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1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR
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ARLINGTON, VA 22202
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