Patent Assignment Details
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| Reel/Frame: | 012242/0849 | |
| Pages: | 4 |
| | Recorded: | 10/03/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09970867
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Filing Dt:
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10/03/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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ALD reactor employing electrostatic chuck
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Assignee
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| 3350 SCOTT BLVD., BLDG. 62 |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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SKJERVEN MORRILL MACPHERSON LLP
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BRIAN D. OGONOWSKY
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CALIFORNIA 95110
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