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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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09072564
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Filing Dt:
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05/05/1998
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Title:
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INJECTOR FOR REACTOR
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09082905
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Filing Dt:
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05/21/1998
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Title:
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PROCESS FOR THE REMOVAL OF COPPER FROM POLISHED BORON DOPED SILICON WAFERS
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09082906
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Filing Dt:
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05/21/1998
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Title:
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PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09082933
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Filing Dt:
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05/21/1998
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Title:
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PROCESS FOR THE PREPARATION OF EPITAXIAL WAFERS FOR RESISTIVITY MEASUREMENTS
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Patent #:
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Issue Dt:
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10/12/1999
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Application #:
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09084565
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Filing Dt:
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05/26/1998
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Title:
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POST-ETCHING ALKALINE TREATMENT PROCESS
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09092391
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Filing Dt:
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06/05/1998
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Title:
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ELECTRICAL RESISTANCE HEATER FOR CRYSTAL GROWING APPARATUS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09093520
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Filing Dt:
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06/08/1998
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Title:
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COLLECTOR FOR AN AUTOMATED ON-LINE BATH ANALYSIS SYSTEM
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09097779
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Filing Dt:
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06/15/1998
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Title:
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PROCESS AND APPRATUS FOR PREPARATION OF SILICON CRYSTALS WITH REDUCED METAL CONTENT
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09107728
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Filing Dt:
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06/30/1998
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Title:
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SUSCEPTOR FOR BARREL REACTOR
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09167747
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Filing Dt:
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10/07/1998
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Title:
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CONTINUOUS OXIDATION PROCESS FOR CRYSTAL PULLING APPARATUS
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09170789
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Filing Dt:
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10/13/1998
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Title:
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ELECTRODE ASSEMBLY FOR ELECTRICAL RESISTANCE HEATER USED IN CRYSTAL GROWING APPARATUS
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09172546
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Filing Dt:
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10/14/1998
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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09187929
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Filing Dt:
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11/06/1998
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Title:
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INJECTION MOLDED INSULATOR
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09191715
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Filing Dt:
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11/12/1998
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Title:
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ION EXTRACTION PROCESS FOR SINGLE SIDE WAFERS
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09229540
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Filing Dt:
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01/13/1999
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Title:
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PROCESS OF STACKING AND MELTING POLYCRYSTALLINE SILICON FOR HIGH QUALITY SINGLE CRYSTAL PRODUCTION
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09234144
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Filing Dt:
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01/19/1999
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Title:
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HEAT SHIELD FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09245238
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Filing Dt:
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02/05/1999
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Title:
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TUNGSTEN DOPED CRUCIBLE AND METHOD FOR PREPARING SAME
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09250908
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Filing Dt:
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02/16/1999
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Title:
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AN EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09252698
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Filing Dt:
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02/18/1999
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Title:
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POLISHING PAD AND PROCESS FOR FORMING SAME
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09258478
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Filing Dt:
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02/26/1999
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Title:
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HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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09262417
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Filing Dt:
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03/04/1999
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Title:
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PRESSURE EQUALIZATION SYSTEM FOR CHEMICAL VAPOR DFPOSITION REACTORS
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09264230
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Filing Dt:
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03/05/1999
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Title:
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METHOD AND SYSTEM OF MEASURING WAVINESS IN SILICON WAFERS
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09268968
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Filing Dt:
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03/16/1999
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Title:
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APPARATUS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09270366
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Filing Dt:
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03/16/1999
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Title:
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VACANCY DOMINATED, DEFECT-FREE SILICON
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09276278
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Filing Dt:
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03/25/1999
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Title:
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METHOD FOR PROCESSING A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09282391
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Filing Dt:
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03/31/1999
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Title:
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PROCESS FOR RECONDITIONING POLISHING PADS
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09285337
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Filing Dt:
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04/02/1999
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Title:
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METHOD OF SLICING SILICON WAFERS FOR LASER MARKING
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09287916
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Filing Dt:
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04/07/1999
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Title:
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METHOD AND SYSTEM OF CONTROLLING TAPER GROWTH IN A SEMICONDUCTOR CRYSTAL GROWTH PROCESS
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09295127
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Filing Dt:
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04/20/1999
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Title:
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METHOD OF CONDITIONING WAFER POLISHING PADS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09322824
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Filing Dt:
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05/28/1999
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Title:
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CABLE ASSEMBLY FOR CRYSTAL PULLER
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09332745
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Filing Dt:
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06/14/1999
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Publication #:
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Pub Dt:
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03/20/2003
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Title:
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METHOD FOR THE PREPARATION OF AN EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09344003
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Filing Dt:
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06/24/1999
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Publication #:
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Pub Dt:
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11/29/2001
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Title:
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CRYSTAL PULLER FOR GROWING LOW DEFECT DENSITY, SELF-INTERSTITIAL DOMINATED SILICON
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09344036
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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06/14/2001
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Title:
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PROCESS FOR PREPARING DEFECT FREE SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09344709
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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07/19/2001
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Title:
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PROCESS FOR GROWTH OF DEFECT FREE SILICON CRYSTALS OF ARBITRARILY LARGE DIAMETERS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09345934
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Filing Dt:
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07/01/1999
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Title:
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METHOD FOR THE SEPARATION, REGENERATION AND REFUSE OF AN EXHAUSTED GLYCOL-BASED SLURRY
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Patent #:
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Issue Dt:
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01/15/2002
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Application #:
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09352980
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Filing Dt:
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07/14/1999
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Title:
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PROCESS FOR FABRICATING SEMICONDUCTOR WAFERS WITH EXTERNAL GETTERING
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09356616
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Filing Dt:
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07/19/1999
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09366815
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Filing Dt:
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08/04/1999
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Title:
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PROCESS FOR REDUCING WAVINESS IN SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09366850
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Filing Dt:
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08/04/1999
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Title:
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NON-UNIFORM MINORITY CARRIER LIFETIME DISTRIBUTIONS IN HIGH PERFORMANCE SILICON POWER DEVICES
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09379383
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Filing Dt:
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08/23/1999
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Title:
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NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09384669
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Filing Dt:
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08/27/1999
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Title:
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PROCESS FOR PREPARING AN IDEAL OXYGEN PRECIPITATING SILICON WAFER
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09385108
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Filing Dt:
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08/27/1999
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Title:
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THERMALLY ANNEALED WAFERS HAVING IMPROVED INTERNAL GETTERING
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09386979
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Filing Dt:
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08/31/1999
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Title:
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APPARATUS FOR SUPPORTING A SEMICONDUCTOR INGOT DURING GROWTH
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09387288
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Filing Dt:
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08/31/1999
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Title:
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SILICON ON INSULATOR STRUCTURE FROM LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09404428
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Filing Dt:
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09/23/1999
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR WAFERS TO BUILD IN BACK SURFACE DAMAGE
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09416432
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Filing Dt:
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10/12/1999
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Title:
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ELECTRICAL RESISTANCE HEATER FOR CRYSTAL GROWING APPARATUS
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09416998
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Filing Dt:
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10/13/1999
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Title:
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THERMALLY ANNEALED, LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09417610
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Filing Dt:
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10/13/1999
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Title:
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EPITAXIAL SILICON WAFERS SUBSTANTIALLY FREE OF GROWN - IN DEFECTS
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09419151
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Filing Dt:
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10/15/1999
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Title:
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METHOD AND SYSTEM FOR MEASURING POLYCRYSTALLINE CHUNK SIZE AND DISTRIBUTION IN THE CHARGE OF A CZOCHRALSKI PROCESS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09421187
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Filing Dt:
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10/19/1999
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Title:
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METHOD OF CONTROLLING GROWTH OF A SEMICONDUCTOR CRYSTAL TO AUTOMATICALLY TRANSITION FROM TAPER GROWTH TO TARGET DIAMETER GROWTH
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09430654
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Filing Dt:
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10/29/1999
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09432928
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Filing Dt:
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11/03/1999
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Title:
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METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09473669
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Filing Dt:
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12/29/1999
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Title:
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POLISHING PROCESS FOR MANUFACTURING DOPANT-STRIATION-FREE POLISHED SILICON WAFERS
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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09475320
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Filing Dt:
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12/30/1999
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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METHOD FOR REVEALING AGGLOMERATED INTRINSIC POINT DEFECTS IN SEMICONDUCTOR CRYSTALS
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09481080
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Filing Dt:
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01/11/2000
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Publication #:
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Pub Dt:
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01/10/2002
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Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09489481
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Filing Dt:
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01/21/2000
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Title:
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Continuous oxidation process for crystal pulling Apparatus
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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09502340
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Filing Dt:
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02/10/2000
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Title:
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METHOD OF CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A LOCKED SEED LIFT GROWTH PROCESS
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09503566
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Filing Dt:
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02/14/2000
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Title:
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Process for producing a silicon melt
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09505269
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Filing Dt:
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02/16/2000
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Title:
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PROCESS FOR REDUCING SURFACE VARIATIONS FOR POLISHED WAFER
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09506105
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Filing Dt:
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02/17/2000
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Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09507811
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Filing Dt:
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02/22/2000
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Title:
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METHOD FOR WAFER PROCESSING
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09511030
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Filing Dt:
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02/23/2000
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Title:
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Apparatus and process for high temperature wafer edge polishing
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09521288
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Filing Dt:
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03/08/2000
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Title:
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Barium doping of molten silicon for use in crystal growing process
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09521525
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Filing Dt:
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03/08/2000
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Title:
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Strontium doping of molten silicon for use in crystal growing process
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09525984
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Filing Dt:
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03/15/2000
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Title:
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Ion extraction apparatus for single side wafers
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09543192
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Filing Dt:
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04/05/2000
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Title:
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METHOD FOR THE DETECTION OF PROCESSING-INDUCED DEFECTS IN A SILICON WAFER
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Patent #:
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Issue Dt:
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09/03/2002
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Application #:
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09566890
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Filing Dt:
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05/08/2000
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Title:
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MODIFIED SUSCEPTOR FOR USE IN CHEMICAL VAPOR DEPOSITION PROCESS
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09568751
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Filing Dt:
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05/11/2000
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Title:
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Multi-stage arsenic doping process to achieve low resistivity in silicon crystal grown by czochralski method
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09596493
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Filing Dt:
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06/19/2000
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Title:
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PROCESS FOR PREPARING SINGLE CRYSTAL SILICON HAVING UNIFORM THERMAL HISTORY
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09606728
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Filing Dt:
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06/29/2000
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Title:
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Single-operation method of cleaning semiconductors after final polishing
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Patent #:
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Issue Dt:
|
01/15/2002
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Application #:
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09607389
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Filing Dt:
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06/30/2000
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Title:
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Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
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Patent #:
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Issue Dt:
|
07/29/2003
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Application #:
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09607391
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Filing Dt:
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06/30/2000
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Title:
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METHOD AND APPARATUS FOR FORMING A SILICON WAFER WITH A DENUDED ZONE
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09608304
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Filing Dt:
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06/30/2000
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Title:
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NON-CONTAMINATING GAS-TIGHT VALVE FOR SEMICONDUCTOR APPLICATIONS
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Patent #:
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Issue Dt:
|
03/26/2002
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Application #:
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09631089
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Filing Dt:
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08/02/2000
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Title:
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Method of polishing a semiconductor wafer
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09633958
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Filing Dt:
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08/08/2000
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Title:
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METHOD AND APPARATUS FOR A WAFER CARRIER HAVING AN INSERT
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Patent #:
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Issue Dt:
|
10/21/2003
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Application #:
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09661821
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Filing Dt:
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09/14/2000
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Title:
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METHOD FOR PRODUCING CZOCHRALSKI SILICON FREE OF AGGLOMERATED SELF-INTERSTITIAL DEFECTS
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Patent #:
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Issue Dt:
|
05/21/2002
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Application #:
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09661822
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Filing Dt:
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09/14/2000
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Title:
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PROCESS FOR DETECTING AGGLOMERATED INTRINSIC POINT DEFECTS BY METAL DECORATION
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Patent #:
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|
Issue Dt:
|
09/16/2003
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Application #:
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09667909
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Filing Dt:
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09/22/2000
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Title:
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MULTI-PIECE EXTRUDED LINK ARM
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|
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Patent #:
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Issue Dt:
|
06/04/2002
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Application #:
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09681160
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Filing Dt:
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02/02/2001
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Title:
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METHOD AND APPARATUS TO PLACE WAFERS INTO AND OUT OF MACHINE
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|
|
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Patent #:
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Issue Dt:
|
03/30/2004
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Application #:
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09682677
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Filing Dt:
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10/04/2001
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Publication #:
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Pub Dt:
|
04/10/2003
| | | | |
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Title:
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POLISHING APPARATUS, POLISHING HEAD AND METHOD
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|
|
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Patent #:
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|
Issue Dt:
|
11/19/2002
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Application #:
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09684266
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Filing Dt:
|
10/06/2000
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Title:
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HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
01/07/2003
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Application #:
|
09691994
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Filing Dt:
|
10/19/2000
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|
Title:
|
ELECTRICAL RESISTANCE HEATER AND METHOD FOR CRYSTAL GROWING APPARATUS
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|
|
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Patent #:
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Issue Dt:
|
07/01/2003
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Application #:
|
09704893
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Filing Dt:
|
11/02/2000
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Title:
|
IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION-LESS PROCESS THEREFOR
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|
|
|
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Patent #:
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Issue Dt:
|
06/17/2003
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Application #:
|
09704900
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Filing Dt:
|
11/02/2000
|
|
Title:
|
A PROCESS FOR THE PREPARATION OF AN IDEAL OXYGEN PRECIPITATING SILICON WAFER HAVING AN ASYMMETRICAL VACANCY CONCENTRATION PROFILE CAPABLE OF FORMING AN ENHANCED DENUDED ZONE
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|
|
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Patent #:
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|
Issue Dt:
|
04/29/2003
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Application #:
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09705092
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Filing Dt:
|
11/02/2000
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Title:
|
LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
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|
|
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Patent #:
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|
Issue Dt:
|
09/24/2002
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Application #:
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09711198
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Filing Dt:
|
11/09/2000
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|
Title:
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METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
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|
|
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Patent #:
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|
Issue Dt:
|
02/04/2003
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Application #:
|
09723847
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Filing Dt:
|
11/28/2000
|
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Title:
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DEFECT CLASSIFICATION USING SCATTERED LIGHT INTENSITIES
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|
|
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
09730171
|
Filing Dt:
|
12/05/2000
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|
Publication #:
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Pub Dt:
|
04/19/2001
| | | | |
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Title:
|
Process for collecting and analyzing the content of a liquid in an automated on-line bath analysis system
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|
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Patent #:
|
NONE
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Issue Dt:
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Application #:
|
09730172
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Filing Dt:
|
12/05/2000
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Publication #:
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Pub Dt:
|
04/19/2001
| | | | |
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Title:
|
Process for collecting and analyzing the content of a liquid in an automated on-line bath analysis system
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|
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Patent #:
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|
Issue Dt:
|
01/29/2002
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Application #:
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09737715
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Filing Dt:
|
12/15/2000
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Publication #:
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Pub Dt:
|
10/18/2001
| | | | |
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Title:
|
Silicon on insulator structure having a low defect density handle wafer and process for the preparation thereof
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|
|
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Patent #:
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|
Issue Dt:
|
12/24/2002
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Application #:
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09751897
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Filing Dt:
|
12/28/2000
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Publication #:
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Pub Dt:
|
07/04/2002
| | | | |
|
Title:
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SEMICONDUCTOR WAFER HOLDER
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|
|
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Patent #:
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|
Issue Dt:
|
07/22/2003
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Application #:
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09752222
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Filing Dt:
|
12/29/2000
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Publication #:
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Pub Dt:
|
11/08/2001
| | | | |
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Title:
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EPITAXIAL SILICON WAFER FREE FROM AUTODOPING AND BACKSIDE HALO AND A METHOD AND APPARATUS FOR THE PREPARATION THEREOF
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|
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
09757121
|
Filing Dt:
|
01/09/2001
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|
Publication #:
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Pub Dt:
|
09/12/2002
| | | | |
|
Title:
|
Crystal puller and method for growing single crystal semiconductor material
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|
|
|
|
Patent #:
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NONE
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Issue Dt:
|
|
Application #:
|
09769773
|
Filing Dt:
|
01/25/2001
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|
Publication #:
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|
Pub Dt:
|
10/03/2002
| | | | |
|
Title:
|
Method and apparatus for reconditioning a shipping container
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09797391
|
Filing Dt:
|
03/01/2001
|
|
Publication #:
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|
Pub Dt:
|
05/02/2002
| | | | |
|
Title:
|
Statistical control method for proportions with small sample sizes
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/18/2003
|
Application #:
|
09807907
|
Filing Dt:
|
06/08/2001
|
|
Title:
|
CARRIER FOR CLEANING SILICON WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/2002
|
Application #:
|
09811982
|
Filing Dt:
|
03/19/2001
|
|
Title:
|
CRYSTAL PULLER AND METHOD FOR GROWING MONOCRYSTALLINE SILICON INGOTS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2003
|
Application #:
|
09815508
|
Filing Dt:
|
03/23/2001
|
|
Publication #:
|
|
Pub Dt:
|
09/26/2002
| | | | |
|
Title:
|
HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/25/2002
|
Application #:
|
09816015
|
Filing Dt:
|
03/23/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/04/2001
| | | | |
|
Title:
|
LOW DEFECT DENSITY, SELF-INTERSTITIAL DOMINATED SILICON
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/25/2002
|
Application #:
|
09833777
|
Filing Dt:
|
04/12/2001
|
|
Publication #:
|
|
Pub Dt:
|
09/13/2001
| | | | |
|
Title:
|
LOW DEFECT DENSITY SILICON AND A PROCESS FOR PRODUCING LOW DEFECT DENSITY SILICON WHEREIN V/G0 IS CONTROLLED BY CONTROLLING HEAT TRANSFER AT THE MELT/SOLID INTERFACE
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|
