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Patent Assignment Details

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Reel/Frame:	012272/0007			Pages:	5
		Recorded:	10/22/2001
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 1

Patent #:	7241993	Issue Dt:	07/10/2007	Application #:	09891511	Filing Dt:	06/27/2001
Publication #:	US20020028399	Pub Dt:	03/07/2002
Title:	INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM

Assignors

NAKASUJI, MAMORU

Exec Dt:

08/20/2001

NOJI, NOBUHARU

Exec Dt:

08/20/2001

SATAKE, TOHRU

Exec Dt:

08/20/2001

HATAKEYAMA, MASAHIRO

Exec Dt:

08/20/2001

KIMBA, TOSHIFUMI

Exec Dt:

08/20/2001

SOBUKAWA, HIROSI

Exec Dt:

08/20/2001

YOSHIKAWA, SHOJI

Exec Dt:

08/20/2001

MURAKAMI, TAKESHI

Exec Dt:

08/20/2001

WATANABE, KENJI

Exec Dt:

08/20/2001

KARIMATA, TSUTOMU

Exec Dt:

08/20/2001

OOWADA, SHIN

Exec Dt:

08/20/2001

SAITO, MUTSUMI

Exec Dt:

08/20/2001

YAMAZAKI, YUICHIRO

Exec Dt:

08/20/2001

NAGAI, TAKAMITSU

Exec Dt:

08/20/2001

NAGAHAMA, ICHIROTA

Exec Dt:

08/20/2001

Assignees

EBARA CORPORATION

11-1, HANEDA ASAHI-CHO, OHTA-KU

TOKYO, JAPAN

KABUSHIKI KAISHA TOSHIBA

72 HORIKAWA-CHO, SAIWAI-KU

KAWASAKI-SHI, KANAGAWA-KEN, JAPAN

Correspondence name and address
	ARMSTRONG, WESTERMAN, HATTORI, ET AL
	WILLIAM G. KRATZ, JR.
	1725 K STREET, N.W., SUITE 1000
	WASHINGTON, D.C. 20006

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