Patent Assignment Details
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| Reel/Frame: | 012273/0302 | |
| Pages: | 2 |
| | Recorded: | 10/16/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/15/1989
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Application #:
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07173137
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Filing Dt:
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03/23/1988
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Title:
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RAPID THERMAL FURNACE FOR SEMICONDUCTOR PROCESSING
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Assignee
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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DENIS A. ROBITAILLE
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CHIEF PATENT COUNSEL
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55 CHERRY HILL DRIVE
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BEVERLY, MA 01915
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