Patent Assignment Details
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| Reel/Frame: | 012292/0787 | |
| Pages: | 2 |
| | Recorded: | 10/30/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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09946507
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Filing Dt:
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09/06/2001
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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PROCESS FOR PRODUCING A SEMICONDUCTOR DEVICE INCLUDING ETCHING USING A MULTI-STEP ETCHING TREATMENT HAVING DIFFERENT GAS COMPOSITIONS IN EACH STEP
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Assignee
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| CHIYODA-KU |
| 6, KANDA SURUGADAI 4-CHOME |
| TOKYO, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT ET AL.
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WILLIAM I SOLOMON
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1300 NORTH 17TH ST
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SUITE 1800
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ARLINGTON, VA 22209
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