Patent Assignment Details
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Reel/Frame: | 012330/0270 | |
| Pages: | 5 |
| | Recorded: | 11/28/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09641461
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Filing Dt:
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08/18/2000
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Title:
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Method and apparatus for thermal processing of semiconductor substrates
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Assignees
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7011 EAST AVENUE |
LIVERMORE, CALIFORNIA 94550 |
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3550 WEST WARREN AVENUE |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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WILSON SONSINI GOODRICH & ROSATI
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MICHAEL J. MURPHY
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SR 1-2
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650 PAGE MILL ROAD
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PALO ALTO, CA 94304-1050
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