Patent Assignment Details
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| Reel/Frame: | 012341/0319 | |
| Pages: | 2 |
| | Recorded: | 11/28/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09997870
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Filing Dt:
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11/28/2001
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Title:
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MEASUREMENT OF SUBSTRATE TEMPERATURE IN A PROCESS CHAMBER USING NON-CONTACT FILTERED INFRARED PYROMETRY
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Assignee
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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MARTINE & PENILLA,LLP
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MICHAEL L. GENCARELLA ESQ
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710 LAKEWAY DRIVE
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SUITE 170
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SUNNYVALE, CA 94085
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