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Total properties:
24
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Patent #:
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Issue Dt:
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06/29/1982
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Application #:
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06131205
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Filing Dt:
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03/17/1980
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Title:
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FIELD EMISSION GUN WITH NOISE COMPENSATION
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Patent #:
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Issue Dt:
|
08/09/1983
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Application #:
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06280414
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Filing Dt:
|
07/06/1981
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Title:
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PARTICLE BEAM INSTRUMENTATION ION PUMP
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Patent #:
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Issue Dt:
|
04/24/1984
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Application #:
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06280416
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Filing Dt:
|
07/06/1981
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Title:
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HIGH THROUGHPUT/HIGH RESOLUTION PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
|
10/25/1983
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Application #:
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06337205
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Filing Dt:
|
01/05/1982
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Title:
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ELECTROSTATIC CASSETTE
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Patent #:
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Issue Dt:
|
09/04/1984
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Application #:
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06342696
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Filing Dt:
|
01/26/1982
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Title:
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COMPOSITE CONCENTRIC-GAP MAGNETIC LENS
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Patent #:
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Issue Dt:
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02/05/1985
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Application #:
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06491678
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Filing Dt:
|
05/05/1983
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Title:
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VIRTUAL ADDRESSING FOR E-BEAM LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/22/1987
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Application #:
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06600246
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Filing Dt:
|
04/16/1984
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Title:
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FIELD EMISSION GUN ELECTRODE GEOMETRY FOR IMPROVED FOCUS STABILITY
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Patent #:
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Issue Dt:
|
11/29/1988
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Application #:
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07036731
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Filing Dt:
|
04/10/1987
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Title:
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SPECIMEN DISTANCE MEASURING SYSTEM
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Patent #:
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Issue Dt:
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12/20/1988
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Application #:
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07062038
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Filing Dt:
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06/15/1987
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Title:
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DIFFERENTIALLY PUMPED SEAL APPARATUS
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Patent #:
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Issue Dt:
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06/06/1989
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Application #:
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07109883
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Filing Dt:
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10/15/1987
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Title:
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GUARD RING FOR A DIFFERENTIALLY PUMPED SEAL APPARATUS
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Patent #:
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Issue Dt:
|
04/04/1989
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Application #:
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07141812
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Filing Dt:
|
01/11/1988
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Title:
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APPARATUS FOR PRESELECTING AND MAINTAINING A FIXED GAP BETWEEN A WORKPIECE AND A VACUUM SEAL APPARATUS IN PARTICLE BEAM LITHOGRAPHY SYSTEMS
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Patent #:
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Issue Dt:
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12/05/1989
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Application #:
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07167601
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Filing Dt:
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03/14/1988
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Title:
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SILCON GRID AS A REFERENCE AND CALIBRATION STANDARD IN A PARTICLE BEAM LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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10/30/1990
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Application #:
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07367919
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Filing Dt:
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06/19/1989
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Title:
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METHOD OF CREATING ISOLATED PLATES ON THE INSIDE SURFACE OF A METALLIZED SUBSTRATE
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|
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Patent #:
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|
Issue Dt:
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05/29/1990
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Application #:
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07385042
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Filing Dt:
|
07/26/1989
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Title:
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PASSIVE ELECTROSTATIC VACUUM PARTICLE COLLECTOR
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|
|
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Patent #:
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|
Issue Dt:
|
01/22/1991
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Application #:
|
07391202
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Filing Dt:
|
08/08/1989
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Title:
|
ELECTRON-DETECTOR DIODE BIASSING SCHEME FOR IMPROVED WRITING BY AN ELECTRON BEAM LITHOGRAPHY MACHINE
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|
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Patent #:
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|
Issue Dt:
|
09/11/1990
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Application #:
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07391715
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Filing Dt:
|
08/07/1989
|
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Title:
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NON-CONTACTING METHOD OF CLEANING SURFACES WITH A PLANOAR GAS BEARING
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|
|
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Patent #:
|
|
Issue Dt:
|
04/30/1991
|
Application #:
|
07524508
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Filing Dt:
|
05/17/1990
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Title:
|
THERMALLY STABLE MAGNETIC DEFLECTION ASSEMBLY AND METHOD OF MAKING SAME
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|
|
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Patent #:
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|
Issue Dt:
|
08/04/1992
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Application #:
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07648667
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Filing Dt:
|
01/31/1991
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Title:
|
TEMPERATURE STABLE MAGNETIC DEFLECTION ASSEMBLY
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Patent #:
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Issue Dt:
|
04/07/1992
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Application #:
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07664066
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Filing Dt:
|
03/04/1991
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Title:
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MULTIPHASE PRINTING FOR E-BEAM LITHOGRAPHY
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|
|
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Patent #:
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Issue Dt:
|
03/23/1993
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Application #:
|
07671425
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Filing Dt:
|
03/04/1991
|
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Title:
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LOW ABERRATION FIELD EMISSION ELECTRON GUN
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|
|
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Patent #:
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|
Issue Dt:
|
05/11/1993
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Application #:
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07705227
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Filing Dt:
|
05/24/1991
|
|
Title:
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LAMINAR FLOW GAS DIFFUSER
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|
|
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Patent #:
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|
Issue Dt:
|
01/04/1994
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Application #:
|
07706612
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Filing Dt:
|
05/29/1991
|
|
Title:
|
HIGH ACCURACY BEAM BLANKER
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|
|
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Patent #:
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Issue Dt:
|
01/19/1993
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Application #:
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07713929
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Filing Dt:
|
06/12/1991
|
|
Title:
|
ROLLING ELEMENT CAGE CONSTRAINT
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|
|
|
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Patent #:
|
|
Issue Dt:
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09/21/1993
|
Application #:
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07759553
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Filing Dt:
|
09/12/1991
|
|
Title:
|
DISCRETE PHASE SHIFT MASK WRITING
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