Patent Assignment Details
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Reel/Frame: | 012367/0986 | |
| Pages: | 4 |
| | Recorded: | 12/07/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09942519
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Filing Dt:
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08/29/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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Charged-particle-beam microlithography methods and apparatus providing reduced reticle heating
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Assignee
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FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN LLP
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DONALD L. STEPHENS, JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON ST.
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PORTLAND, OR 97204-2988
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