Patent Assignment Details
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| Reel/Frame: | 012370/0929 | |
| Pages: | 4 |
| | Recorded: | 11/30/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10006398
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Filing Dt:
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11/30/2001
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Title:
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ALIGNMENT PROCESS FOR INTEGRATED CIRCUIT STRUCTURES ON SEMICONDUCTOR SUBSTRATE USING SCATTEROMETRY MEASUREMENTS OF LATENT IMAGES IN SPACED APART TEST FIELDS ON SUBSTRATE
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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SENDEEP JAGGI, CHIEF INTELL PROP COUNSEL
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INELLECTUAL PROPERTY LAW DEPARTMENT
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1551 MCCARTHY BOULEVARD, M/S D-106
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MILPITAS, CA 95035
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