Patent Assignment Details
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| Reel/Frame: | 012497/0089 | |
| Pages: | 5 |
| | Recorded: | 01/16/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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09906276
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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PLASMA CURING OF MSQ-BASED POROUS LOW-K FILM MATERIALS
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Assignee
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP
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BRIAN L. SMILER
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ONE DAYTON CENTRE
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ONE SOUTH MAIN STREET, SUITE 500
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DAYTON, OHIO 45402
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