Patent Assignment Details
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| Reel/Frame: | 012531/0276 | |
| Pages: | 2 |
| | Recorded: | 01/29/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09983014
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Filing Dt:
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10/22/2001
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Publication #:
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Pub Dt:
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05/23/2002
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Title:
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Integrated fluid supply apparatus, sealing device used there, and semiconductor manufacturing system using it
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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GLENN J. PERRY
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1600 TYSONS BLVD.
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MCLEAN, VA 22102
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