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Patent Assignment Details
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Reel/Frame:012552/0320   Pages: 11
Recorded: 01/24/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/22/2005
Application #:
10057014
Filing Dt:
01/24/2002
Publication #:
Pub Dt:
07/24/2003
Title:
IN SITU APPLICATION OF ETCH BACK FOR IMPROVED DEPOSITION INTO HIGH-ASPECT-RATIO FEATURES
Assignors
1
Exec Dt:
12/20/2001
2
Exec Dt:
01/21/2002
3
Exec Dt:
01/08/2002
4
Exec Dt:
01/24/2002
5
Exec Dt:
01/16/2002
Assignee
1
LEGAL AFFIARS DEPARTMENT
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
APPLIED MATERIALS, INC.
PATENT COUNSEL
LEGAL AFFAIRS DEPARTMENT
P.O. BOX 450A, M/S 2061
SANTA CLARA, CA 95052

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