Patent Assignment Details
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| Reel/Frame: | 012580/0413 | |
| Pages: | 2 |
| | Recorded: | 02/01/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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10066108
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Filing Dt:
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02/01/2002
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Publication #:
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Pub Dt:
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01/09/2003
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Title:
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OPTIMIZED CAPPING LAYERS FOR EUV MULTILAYERS
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Assignee
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| 1111 FRANKLIN STREET |
| OAKLAND, CALIFORNIA 94607 |
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Correspondence name and address
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LAWRENCE LIVERMORE NAT. LABORATORY
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ALAN H. THOMPSON
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PATENT GOUP, L-703
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BOX 808, L-703
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LIVERMORE, CA 94551
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