Patent Assignment Details
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| Reel/Frame: | 012595/0298 | |
| Pages: | 2 |
| | Recorded: | 02/11/2002 | | |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09692150
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Filing Dt:
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10/20/2000
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Title:
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DEVICE AND METHOD FOR SUPPRESSING SPACE CHARGE INDUCED ABERRATIONS IN CHARGED-PARTICLE PROJECTION LITHOGRAPHY SYSTEMS
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Assignee
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| OFFICE OF GENERAL COUNSEL |
| 3701 NORTH FAIRFAX DRIVE |
| ARLINGTON, VIRGINIA 22203 |
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Correspondence name and address
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KIMBERLY RICHMOND
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OFFICE OF GENERAL COUNSEL
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3701 NORTH FAIRFAX DRIVE
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ARLINGTON, VA 22203
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