Patent Assignment Details
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| Reel/Frame: | 012627/0653 | |
| Pages: | 4 |
| | Recorded: | 02/28/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09957684
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Filing Dt:
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09/20/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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PERFORMANCE EVALUATION METHOD FOR PLASMA PROCESSING APPARATUS FOR CONTINUOUSLY MAINTAINING A DESIRED PERFORMANCE LEVEL
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Assignees
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| 1-7 YUKIGAYA, OTSUKA-CHO |
| OTA-KU, TOKYO, JAPAN |
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| AOBA-KU, SENDAI-SHI |
| 2-1-17-301 KOMEGAFUKURO |
| MIYAGI-KEN, JAPAN |
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Correspondence name and address
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BRINKS HOFER GILSON & LIONE
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JASPER W. DOCKREY
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P.O. BOX 10395
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CHICAGO, IL 60610
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