Patent Assignment Details
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| Reel/Frame: | 012674/0153 | |
| Pages: | 3 |
| | Recorded: | 02/28/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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10006633
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Filing Dt:
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12/05/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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PATTERN WIDTH SLIMMING-INHIBITING METHOD OF PHOTORESIST PATTERN USING PHOTORESIST COMPOSITION CONTAINING THERMAL ACID GENERATOR
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Assignee
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| SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-SHI |
| KYOUNGKI-DO 467-860, KOREA, REPUBLIC OF |
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Correspondence name and address
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MARSHALL, GERSTEIN & BORUN
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MICHAEL R. HULL
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6300 SEARS TOWER
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233 S. WACKER DRIVE
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CHICAGO, IL 60606-6357
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