Patent Assignment Details
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| Reel/Frame: | 012685/0773 | |
| Pages: | 4 |
| | Recorded: | 03/15/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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09985324
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Filing Dt:
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11/02/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING FORMER
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Assignee
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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ARMSTRONG, WESTERMAN & HATTORI, LLP
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STEPHEN G. ADRIAN
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1725 K STREET, N.W., SUITE 1000
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WASHINGTON, D.C. 20006
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Domestic representative
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SUITE 1000
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1725 K STREET, N.W.
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WASHINGTON, D.C. 20006
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