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Patent Assignment Details
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Reel/Frame:012687/0564   Pages: 2
Recorded: 03/08/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10094532
Filing Dt:
03/08/2002
Publication #:
Pub Dt:
09/11/2003
Title:
REACTION FRAME FOR A WAFER SCANNING STAGE WITH ELECTROMAGNETIC CONNECTIONS TO GROUND
Assignor
1
Exec Dt:
03/05/2002
Assignee
1
2-3 MARUNOUCHI, 3-CHOME, CHIYODA KU
TOKYO, JAPAN
Correspondence name and address
RITTER, LANG & KAPLAN LLP
PEGGY A. SU
12930 SARATOGA AVE.
SUITE D1
SARATOGA, CA 95070

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