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Reel/Frame:012689/0858   Pages: 5
Recorded: 03/15/2002
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNOR, FILED ON 12-11-01. RECORDED ON REEL 012373, FRAME 0167. ASSIGNOR HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST.
Total properties: 1
1
Patent #:
Issue Dt:
06/21/2005
Application #:
10011725
Filing Dt:
12/11/2001
Publication #:
Pub Dt:
08/08/2002
Title:
EXHAUST APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Assignor
1
Exec Dt:
11/19/2001
Assignee
1
1006, OAZA KADOMA, KADOMA-SHI
OSAKA, JAPAN 571-8
Correspondence name and address
NIXON PEABODY LLP
ERIC J. ROBINSON
8180 GREENSBORO DRIVE
SUITE 800
MCLEAN, VA 22102

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