Patent Assignment Details
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| Reel/Frame: | 012767/0516 | |
| Pages: | 3 |
| | Recorded: | 04/04/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10116327
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Filing Dt:
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04/04/2002
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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APPARATUS FOR POLISHING PERIPHERY OF DEVICE WAFER AND POLISHING METHOD
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Assignee
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| 26478 HAYAKAWA, AYASE-SHI |
| KANAGAWA 252-1123, JAPAN |
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Correspondence name and address
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SNELL & WILMER LLP
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MICHAEL K. KELLY
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ONE ARIZONA CENTER
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400 E. VAN BUREN STREET
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PHOENIX, ARIZONA 85004-2202
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