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Reel/Frame:012767/0552   Pages: 3
Recorded: 03/27/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/11/2003
Application #:
10061783
Filing Dt:
02/01/2002
Publication #:
Pub Dt:
07/25/2002
Title:
APPARATUS AND METHODS FOR CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
Assignors
1
Exec Dt:
03/15/2002
2
Exec Dt:
03/15/2002
3
Exec Dt:
03/15/2002
Assignee
1
1105 NORTH MARKET STREET, SUITE 1300
WILMINGTON, DELAWARE 19899
Correspondence name and address
RODEL HOLDINGS, INC.
KENNETH A. BENSON
1105 NORTH MARKET STREET
SUITE 1300
WILMINGTON, DE 19899

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