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Patent Assignment Details
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Reel/Frame:012788/0467   Pages: 4
Recorded: 04/04/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10000825
Filing Dt:
10/24/2001
Publication #:
Pub Dt:
10/10/2002
Title:
Substrate temperature control in an ALD reactor
Assignors
1
Exec Dt:
03/12/2002
2
Exec Dt:
03/12/2002
3
Exec Dt:
03/12/2002
4
Exec Dt:
03/12/2002
Assignee
1
3350 SCOTT BOULEVARD, BUILDING 62
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
SKJERVEN MORRILL MACPHERSON LLP
CHRISTOPHER B. ALLENBY
25 METRO DRIVE, SUITE 700
SAN JOSE, CA 95110

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