Patent Assignment Details
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| Reel/Frame: | 012828/0818 | |
| Pages: | 5 |
| | Recorded: | 06/25/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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10142681
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Filing Dt:
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05/10/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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COMPOSITIONS AND METHODS FOR DIELECTRIC CMP
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Assignee
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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Correspondence name and address
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CABOT MICROELECTRONICS CORPORATION
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PHYLLIS T. TURNER-BRIM, ESQ.
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870 N. COMMONS DR.
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ASSOCIATE GENERAL COUNSEL, IP.
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AURORA, IL 60504
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