Patent Assignment Details
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Reel/Frame: | 012866/0286 | |
| Pages: | 4 |
| | Recorded: | 04/10/2002 | | |
Conveyance: | INVALID ASSIGNMENT. SEE RECORDING AT REEL 012876, FRAME 0977. (RE-RECORDED TO CORRECT THE NUMBER OF MICROFIM PAGES) |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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10118955
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Filing Dt:
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04/10/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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APPARATUS FOR AND METHOD OF ETCHING
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Assignee
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2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
TOKYO 100-8310, JAPAN |
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Correspondence name and address
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OBLON SPIVAK MCCLELLAND ET AL.
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MARVIN J. SPIVAK
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1755 JEFFERSON DAVIS HWY., 4TH FL.
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ARLINGTON, VA 22202
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