Patent Assignment Details
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| Reel/Frame: | 012873/0619 | |
| Pages: | 4 |
| | Recorded: | 05/01/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09619143
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Filing Dt:
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07/19/2000
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Title:
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METHOD AND APPARATUS FOR DETECTING MICRO-SCRATCHES IN SEMICONDUCTOR WAFERS DURING POLISHING PROCESS
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Assignee
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| FLORIDA STATE UNIVERSITY |
| 109 WESCOTT BUILDING |
| TALLAHASSEE, FLORIDA 32308 |
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Correspondence name and address
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THOMPSON COBURN LLP
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ALAN H. NORMAN
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ONE US BANK PLAZA, SUITE 3500
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ST. LOUIS, MO 63101-9928
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