Patent Assignment Details
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| Reel/Frame: | 012880/0822 | |
| Pages: | 4 |
| | Recorded: | 05/10/2002 | | |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09635984
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Filing Dt:
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08/09/2000
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Title:
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PNEUMATIC CONTROL SYSTEM AND METHOD FOR SHAPING DEFORMABLE MIRRORS IN LITHOGRAPHIC PROJECTION SYSTEMS
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Assignee
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| 77 DANBURY ROAD |
| WILTON, CONNECTICUT 06897 |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN, ET AL.
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DONALD J. FEATHERSTONE
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1100 NEW YORK AVENUE, N.W.
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SUITE 600
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WASHINGTON, D.C. 20005-3934
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