Patent Assignment Details
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| Reel/Frame: | 012881/0485 | |
| Pages: | 3 |
| | Recorded: | 05/06/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10140468
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Filing Dt:
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05/06/2002
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Title:
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METHOD AND APPARATUS FOR CONTROLLING A MULTI-CHAMBER PROCESSING TOOL
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Assignee
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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Correspondence name and address
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WILLIAMS, MORGAN & AMERSON, PC
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J. MIKE AMERSON, ESQ.
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7676 HILLMONT, STE. 250
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HOUSTON, TX 77040
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