Patent Assignment Details
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| Reel/Frame: | 012939/0996 | |
| Pages: | 3 |
| | Recorded: | 05/23/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10154285
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Filing Dt:
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05/23/2002
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Title:
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THIN SIDEWALL MULTI-STEP HDP DEPOSITION METHOD TO ACHIEVE COMPLETELY FILLED HIGH ASPECT RATIO TRENCHES
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVE. 3 |
| HSIN-CHU, TAIWAN |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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