Patent Assignment Details
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| Reel/Frame: | 012940/0217 | |
| Pages: | 2 |
| | Recorded: | 05/23/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10152682
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Filing Dt:
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05/23/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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Semiconductor manufacturing system with exhaust pipe, deposit elimination method for use with semiconductor manufacturing system, and method of manufacturing semiconductor device
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Assignee
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| 2-3, MARUNOUCHI, 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8 |
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Correspondence name and address
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MCDERMOTT, WILL & EMERY
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STEPHEN A. BECKER
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600 13TH STREET, N.W.
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WASHINGTON, D.C. 20005
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