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Patent Assignment Details
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Reel/Frame:012960/0692   Pages: 3
Recorded: 05/28/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/22/2005
Application #:
10157445
Filing Dt:
05/28/2002
Publication #:
Pub Dt:
12/12/2002
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Assignors
1
Exec Dt:
05/22/2002
2
Exec Dt:
05/22/2002
3
Exec Dt:
05/22/2002
Assignee
1
MINATO-KU
3-6 AKASAKA 5-CHOME
TOKYO-TO, JAPAN
Correspondence name and address
MORRISON & FOERSTER LLP
DAVID L. FEHRMAN
555 WEST FIFTH STREET
SUITE 3500
LOS ANGELES, CA 90013-1024

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