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Reel/Frame:012981/0684   Pages: 6
Recorded: 06/11/2002
Conveyance: CORRECTED RECORDATION FORM COVER SHEET TO ADD INVENTOR'S NAME, PREVIOUSLY RECORDED AT REEL/FRAME 012718/0575 (ASSIGNMENT OF ASSIGNOR'S INTEREST)
Total properties: 1
1
Patent #:
Issue Dt:
07/05/2005
Application #:
09952649
Filing Dt:
09/14/2001
Publication #:
Pub Dt:
08/08/2002
Title:
PLASMA CURING PROCESS FOR POROUS LOW-K MATERIALS
Assignors
1
Exec Dt:
11/07/2001
2
Exec Dt:
11/07/2001
3
Exec Dt:
11/07/2001
4
Exec Dt:
11/07/2001
5
Exec Dt:
11/07/2001
6
Exec Dt:
11/07/2001
Assignee
1
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondence name and address
KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP
BRIAN L. SMILER
ONE DAYTON CENTRE
ONE SOUTH MAIN STREET, SUITE 500
DAYTON, OH 45402

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