Patent Assignment Details
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| Reel/Frame: | 013016/0905 | |
| Pages: | 4 |
| | Recorded: | 06/14/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10173340
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Filing Dt:
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06/14/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM WITH REDUCED FEEDING LOSS, AND METHOD FOR STABILIZING THE APPARATUS AND SYSTEM
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Assignees
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| 1-7 YUKIGAYA, OTSUKA-CHO |
| OTA-KU, TOKYO, JAPAN |
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| 2-4-1 NISHISHINJUKU, SHINJUKU-KU |
| TOKYO, JAPAN |
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| AOBA-KU, SENDAI-SHI |
| 2-1-17-301 KOMEGAFUKURO |
| MIYAGI-KEN, JAPAN |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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STEVE D. BEYER
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P.O. BOX 778
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BERKELEY, CA 94704-0778
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